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Title: Nanolaminate Deformable Mirrors

Conference ·

LLNL is developing nanolaminate-based deformable mirrors for terrestrial and space-based optical systems. We are combining two complementary technologies: high-spatial-density electrostatic actuators and thin, flexible, lightweight nanolaminate foils. Electrostatic actuation of MEMS-like structures provides densely-spaced, repeatable deflections on the order of 10 {micro}m. Nanolaminate foils provide a mirror surface that is simultaneously flexible enough to deform under electrostatic forces and tough enough to survive handling and bonding. We are working on two similar deformable mirrors that will demonstrate the feasibility of nanolaminate-based deformable mirrors over a wide range of size scales. The high-density device has a pitch of 1.255 mm between 1,024 square pixels. The large-scale device has a pitch of 9 mm between 76 hexagonal pixels [1], [2].

Research Organization:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
W-7405-ENG-48
OSTI ID:
896291
Report Number(s):
UCRL-PROC-221776; TRN: US200703%%660
Resource Relation:
Conference: Presented at: Optical MEMS 2006, Big Sky, MT, United States, Aug 21 - Aug 24, 2006
Country of Publication:
United States
Language:
English