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Amorphous Transparent Conducting Oxides (TCOs) Deposited at T 100<= ..deg.. C (Presentation)

Conference ·
OSTI ID:894431
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The summary of this report is that amorphous InZnO (a-IZO) is a very versatile TCO with: (1) low process temperatures ({approx} 100 C); (2) easy to make by sputtering; (3) excellent optical and electronic properties; (4) very smooth etchable films; and (5) remarkable thermal processing stability.
Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO.
Sponsoring Organization:
USDOE
DOE Contract Number:
AC36-99GO10337
OSTI ID:
894431
Report Number(s):
NREL/PR-520-39868
Country of Publication:
United States
Language:
English

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Related Subjects

14 SOLAR ENERGY
36 MATERIALS SCIENCE
AMORPHOUS
ENERGY CONVERSION
FILM DEPOSITION
METAL OXIDE
NREL
OXIDES
PHOTOVOLTAIC
PROCESSING
PV
SPUTTERING
STABILITY
Solar Energy - Photovoltaics
TCOS
TRANSPARENT CONDUCTING OXIDES