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Office of Scientific and Technical Information
 

Human directed assembly of heterogeneous MEMS devices using precision robotics.

Conference ·
OSTI ID:889941
; ;

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
889941
Report Number(s):
SAND2005-6363C
Country of Publication:
United States
Language:
English

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Related Subjects

42 ENGINEERING
ACCURACY
INTEGRATED CIRCUITS
MANUFACTURING
ROBOTS