Resonant frequency method for monitoring MEMS fabrication.
Journal Article
·
OSTI ID:889407
No abstract prepared.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 889407
- Report Number(s):
- SAND2003-0092J
- Country of Publication:
- United States
- Language:
- English
Similar Records
Super high frequency width extensional aluminum nitride MEMS resonators.
CMP processing issues for MEMS fabrication technology.
RF MEMS phase shifters based on PCB MEMS technology.
Conference
·
Sat Feb 28 23:00:00 EST 2009
·
OSTI ID:950910
CMP processing issues for MEMS fabrication technology.
Conference
·
Tue Jan 31 23:00:00 EST 2006
·
OSTI ID:901720
RF MEMS phase shifters based on PCB MEMS technology.
Journal Article
·
Thu Mar 31 23:00:00 EST 2005
· Proposed for publication in IEEE Electronics Letters.
·
OSTI ID:884752