Halbach arrays in precision motion control
- Massachusetts Institute of Technology, Cambridge, MA (United States)
The Halbach array was developed for use as an optical element in particle accelerators. Following up on a suggestion from Klaus Halbach, the authors have investigated the utility of such arrays as the permanent magnet structure for synchronous machines in cartesian, polar, and cylindrical geometries. Their work has focused on the design of a novel Halbach array linear motor for use in a magnetic suspension stage for photolithography. This paper presents the details of the motor design and its force and power characteristics.
- Research Organization:
- Lawrence Berkeley Lab., CA (United States)
- OSTI ID:
- 88776
- Report Number(s):
- LBL-PUB--754; ON: DE95008449
- Country of Publication:
- United States
- Language:
- English
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