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Investigation of sidewall cracking in PMMA LIGA structures.

Journal Article · Tue Jan 31 23:00:00 EST 2006 · Proposed for publication in the Journal of Micromechanics and Microengineering.

OSTI ID:886638

Levey, Brandon Seth ^[1]; Skala, Dawn M; Hunter, Luke L

University of Michigan, Ann Arbor, Michigan

No abstract prepared.

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Research Organization:: Sandia National Laboratories

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-94AL85000

OSTI ID:: 886638

Report Number(s):: SAND2006-0904J

Journal Information:: Proposed for publication in the Journal of Micromechanics and Microengineering., Journal Name: Proposed for publication in the Journal of Micromechanics and Microengineering.

Country of Publication:: United States

Language:: English

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Related Subjects

36 MATERIALS SCIENCE
CRACK PROPAGATION
CRACKS
PMMA
WALLS