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Deposition of Photosensitive Hydrogenated Amorphous Silicon-Germanium Films with a Tantalum Hot Wire

Journal Article · · Thin Solid Films

No abstract prepared.

Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO.
Sponsoring Organization:
USDOE
DOE Contract Number:
AC36-99GO10337
OSTI ID:
885108
Journal Information:
Thin Solid Films, Journal Name: Thin Solid Films Journal Issue: 1-22006; ISSN THSFAP; ISSN 0040-6090
Country of Publication:
United States
Language:
English