EVOLUTION OF MICROSTRUCTURE IN TI-TA BILAYER THIN FILMS ON POLYCRYSTALLINE-SI AND SI(001)
Journal Article
·
· J. VAC. SCI. TECHNOL., B
OSTI ID:884119
No abstract prepared.
- Research Organization:
- Brookhaven National Laboratory (BNL) National Synchrotron Light Source (NSLS)
- Sponsoring Organization:
- DOE/OFFICE OF SCIENCE
- DOE Contract Number:
- AC02-98CH10886
- OSTI ID:
- 884119
- Report Number(s):
- BNL--76164-2005-JA
- Journal Information:
- J. VAC. SCI. TECHNOL., B, Journal Name: J. VAC. SCI. TECHNOL., B Journal Issue: 1 Vol. 21; ISSN 0734-211X; ISSN JVTBD9
- Country of Publication:
- United States
- Language:
- English
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