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Title: Growth, structure, and tribological behavior of atomic layer deposited tungten disulphide solid lubricant coatings with applications to MEMS.

Journal Article · · Proposed for publication in ACTA Materials.
OSTI ID:882056

No abstract prepared.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
882056
Report Number(s):
SAND2006-1094J; TRN: US200613%%559
Journal Information:
Proposed for publication in ACTA Materials., Journal Name: Proposed for publication in ACTA Materials.
Country of Publication:
United States
Language:
English