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Fabrication of a surface acoustic wave-based correlator using step and flash imprint lithography.

Conference ·
OSTI ID:876388
 [1];  [1];  [2]; ; ;  [2];  [1];  [2];  [1];  [3];  [1]
  1. Motorola Labs, Tempe, AZ
  2. Sandia National Laboratories, Livermore, CA.
  3. Motorola Labs, Tempe, AZ
+ Show Author Affiliations

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
876388
Report Number(s):
SAND2004-2464C
Country of Publication:
United States
Language:
English

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Related Subjects

42 ENGINEERING
ACOUSTICS
ELECTRONIC CIRCUITS
FABRICATION
MASKING