Utilizing on-chip testing and electron microscopy to obtain a mechanistic understanding of fatigue and wear in polysilicon structural films.
Conference
·
OSTI ID:876331
- Lawrence Berkeley National Laboratory, Berkeley, CA
- Pennsylvania State University, PA
- Lawrence Berkeley National Laboratory, Berkeley, CA
- Lawrence Berkeley National Laboratory, Berkeley, CA
No abstract prepared.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 876331
- Report Number(s):
- SAND2004-2014C
- Country of Publication:
- United States
- Language:
- English
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