Micro-machined thermo-conductivity detector

Patent · Wed Jan 01 00:00:00 EST 2003

OSTI ID:874973

Yu, Conrad ^[1]

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1. Antioch, CA

A micro-machined thermal conductivity detector for a portable gas chromatograph. The detector is highly sensitive and has fast response time to enable detection of the small size gas samples in a portable gas chromatograph which are in the order of nanoliters. The high sensitivity and fast response time are achieved through micro-machined devices composed of a nickel wire, for example, on a silicon nitride window formed in a silicon member and about a millimeter square in size. In addition to operating as a thermal conductivity detector, the silicon nitride window with a micro-machined wire therein of the device can be utilized for a fast response heater for PCR applications.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: The Regents of the University of California (Oakland, CA)
• Patent Number(s): US 6502983
• OSTI ID: 874973
• Country of Publication: United States
• Language: English

Related Subjects

micro-machined
thermo-conductivity
detector
thermal
conductivity
portable
gas
chromatograph
highly
sensitive
fast
response
time
enable
detection
size
samples
nanoliters
sensitivity
achieved
devices
composed
nickel
wire
example
silicon
nitride
window
formed
millimeter
square
addition
operating
device
utilized
heater
pcr
applications
thermal conductivity
silicon nitride
gas sample
fast response
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