Method of forming fluorine-bearing diamond layer on substrates, including tool substrates

Chang, R P. H.; Grannen, Kevin J

Title: Method of forming fluorine-bearing diamond layer on substrates, including tool substrates

Patent · Tue Jan 01 00:00:00 EST 2002

OSTI ID:874969

Chang, R P. H. ^[1]; Grannen, Kevin J ^[2]

Glenview, IL
Evanston, IL

A method of forming a fluorine-bearing diamond layer on non-diamond substrates, especially on tool substrates comprising a metal matrix and hard particles, such as tungsten carbide particles, in the metal matrix. The substrate and a fluorine-bearing plasma or other gas are then contacted under temperature and pressure conditions effective to nucleate fluorine-bearing diamond on the substrate. A tool insert substrate is treated prior to the diamond nucleation and growth operation by etching both the metal matrix and the hard particles using suitable etchants.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

DOE Contract Number:: FG02-87ER45314

Assignee:: Northwestern Univ. (Evanston, IL)

Patent Number(s):: US 6500488

OSTI ID:: 874969

Country of Publication:: United States

Language:: English

References (26)

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Related Subjects

method
forming
fluorine-bearing
diamond
layer
substrates
including
tool
non-diamond
especially
comprising
metal
matrix
hard
particles
tungsten
carbide
substrate
plasma
gas
contacted
temperature
pressure
conditions
effective
nucleate
insert
treated
prior
nucleation
growth
operation
etching
etchants
pressure conditions
/51/423/427/

Title: Method of forming fluorine-bearing diamond layer on substrates, including tool substrates

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References (26)

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