Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Temperature determination using pyrometry

Patent ·
OSTI ID:874477

A method for determining the temperature of a surface upon which a coating is grown using optical pyrometry by correcting Kirchhoff's law for errors in the emissivity or reflectance measurements associated with the growth of the coating and subsequent changes in the surface thermal emission and heat transfer characteristics. By a calibration process that can be carried out in situ in the chamber where the coating process occurs, an error calibration parameter can be determined that allows more precise determination of the temperature of the surface using optical pyrometry systems. The calibration process needs only to be carried out when the physical characteristics of the coating chamber change.

Research Organization:
SANDIA CORP
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
US 6398406
OSTI ID:
874477
Country of Publication:
United States
Language:
English

References (1)

Pyrometric interferometry for real time molecular beam epitaxy process monitoring journal March 1994