Temperature determination using pyrometry
- Albuquerque, NM
- Bridgewater, NJ
- Princeton, NJ
A method for determining the temperature of a surface upon which a coating is grown using optical pyrometry by correcting Kirchhoff's law for errors in the emissivity or reflectance measurements associated with the growth of the coating and subsequent changes in the surface thermal emission and heat transfer characteristics. By a calibration process that can be carried out in situ in the chamber where the coating process occurs, an error calibration parameter can be determined that allows more precise determination of the temperature of the surface using optical pyrometry systems. The calibration process needs only to be carried out when the physical characteristics of the coating chamber change.
- Research Organization:
- SANDIA CORP
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- US 6398406
- OSTI ID:
- 874477
- Country of Publication:
- United States
- Language:
- English
Pyrometric interferometry for real time molecular beam epitaxy process monitoring
|
journal | March 1994 |
Similar Records
Two-color pyrometry system to eliminate optical errors for spatially resolved measurements in flames
Nonisothermal pyrometry techniques: Research report
Related Subjects
allows
associated
calibration
carried
chamber
change
changes
characteristics
coating
correcting
determination
determined
determining
emission
emissivity
error
errors
grown
growth
heat
heat transfer
kirchhoffs
law
measurements
method
occurs
optical
parameter
physical
precise
process
pyrometry
reflectance
situ
subsequent
surface
systems
temperature
temperature determination
thermal
transfer