Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing
Patent
·
OSTI ID:874226
- Marietta, GA
Systems and methods are described for fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. A method of forming a lithium cobalt oxide film includes depositing a film of lithium cobalt oxide on a substrate; rapidly heating the film of lithium cobalt oxide to a target temperature; and maintaining the film of lithium cobalt oxide at the target temperature for a target annealing time of at most, approximately 60 minutes. The systems and methods provide advantages because they require less time to implement and are, therefore less costly than previous techniques.
- Research Organization:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- DOE Contract Number:
- AC05-96OR22464
- Assignee:
- Lockheed Martin Energy Research Corporation (Oak Ridge, TN)
- Patent Number(s):
- US 6344366
- OSTI ID:
- 874226
- Country of Publication:
- United States
- Language:
- English
Preferred Orientation of Polycrystalline LiCoO[sub 2] Films
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Thin-film cathodes for secondary lithium batteries
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Characterization of sprayed and sputter deposited LiCoO2 thin films for rechargeable microbatteries
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journal | December 1996 |
Characterization of Thin-Film Rechargeable Lithium Batteries with Lithium Cobalt Oxide Cathodes
|
journal | January 1996 |
Substrate Effect on the Microstructure and Electrochemical Properties in the Deposition of a Thin Film LiCoO[sub 2] Electrode
|
journal | January 1999 |
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Related Subjects
fabrication
highly
textured
lithium
cobalt
oxide
films
rapid
thermal
annealing
systems
methods
described
method
forming
film
depositing
substrate
rapidly
heating
target
temperature
maintaining
time
approximately
60
minutes
provide
advantages
require
implement
costly
previous
techniques
methods provide
cobalt oxide
thermal annealing
/438/429/
highly
textured
lithium
cobalt
oxide
films
rapid
thermal
annealing
systems
methods
described
method
forming
film
depositing
substrate
rapidly
heating
target
temperature
maintaining
time
approximately
60
minutes
provide
advantages
require
implement
costly
previous
techniques
methods provide
cobalt oxide
thermal annealing
/438/429/