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High efficiency replicated x-ray optics and fabrication method

Patent ·
OSTI ID:873946
 [1];  [2]
  1. Oakland, CA
  2. Fremont, CA
+ Show Author Affiliations
Replicated x-ray optics are fabricated by sputter deposition of reflecting layers on a super-polished reusable mandrel. The reflecting layers are strengthened by a supporting multilayer that results in stronger stress-relieved reflecting surfaces that do not deform during separation from the mandrel. The supporting multilayer enhances the ability to part the replica from the mandrel without degradation in surface roughness. The reflecting surfaces are comparable in smoothness to the mandrel surface. An outer layer is electrodeposited on the supporting multilayer. A parting layer may be deposited directly on the mandrel before the reflecting surface to facilitate removal of the layered, tubular optic device from the mandrel without deformation. The inner reflecting surface of the shell can be a single layer grazing reflection mirror or a resonant multilayer mirror. The resulting optics can be used in a wide variety of applications, including lithography, microscopy, radiography, tomography, and crystallography.
Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
DOE Contract Number:
W-7405-ENG-48
Assignee:
Regents of Unviersity of California (Oakland, CA)
Patent Number(s):
US 6278764
OSTI ID:
873946
Country of Publication:
United States
Language:
English

References (4)

Design and fabrication of low-cost X-ray mirrors journal October 1996
Electroform replication used for multiple x-ray mirror production journal January 1984
Grazing incidence and multilayer x-ray optical systems conference July 1997
Multilayer option for conical foil x-ray mirrors conference July 1997

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