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Title: Large area atmospheric-pressure plasma jet

Abstract

Large area atmospheric-pressure plasma jet. A plasma discharge that can be operated at atmospheric pressure and near room temperature using 13.56 MHz rf power is described. Unlike plasma torches, the discharge produces a gas-phase effluent no hotter than 250.degree. C. at an applied power of about 300 W, and shows distinct non-thermal characteristics. In the simplest design, two planar, parallel electrodes are employed to generate a plasma in the volume therebetween. A "jet" of long-lived metastable and reactive species that are capable of rapidly cleaning or etching metals and other materials is generated which extends up to 8 in. beyond the open end of the electrodes. Films and coatings may also be removed by these species. Arcing is prevented in the apparatus by using gas mixtures containing He, which limits ionization, by using high flow velocities, and by properly spacing the rf-powered electrode. Because of the atmospheric pressure operation, there is a negligible density of ions surviving for a sufficiently long distance beyond the active plasma discharge to bombard a workpiece, unlike the situation for low-pressure plasma sources and conventional plasma processing methods.

Inventors:
 [1];  [1];  [2];  [3]
  1. (Los Alamos, NM)
  2. (Huntington Beach, CA)
  3. (Los Angeles, CA)
Publication Date:
Research Org.:
Los Alamos National Laboratory (LANL), Los Alamos, NM
OSTI Identifier:
873868
Patent Number(s):
US 6262523
Assignee:
Regents of University of California (Los Alamos, NM) LANL
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
atmospheric-pressure; plasma; jet; discharge; operated; atmospheric; pressure; near; temperature; 13; 56; mhz; rf; power; described; unlike; torches; produces; gas-phase; effluent; hotter; 250; degree; applied; 300; distinct; non-thermal; characteristics; simplest; design; planar; parallel; electrodes; employed; generate; volume; therebetween; long-lived; metastable; reactive; species; capable; rapidly; cleaning; etching; metals; materials; generated; extends; films; coatings; removed; arcing; prevented; apparatus; gas; mixtures; containing; limits; ionization; flow; velocities; properly; spacing; rf-powered; electrode; operation; negligible; density; surviving; sufficiently; distance; active; bombard; workpiece; situation; low-pressure; sources; conventional; processing; methods; flow velocities; atmospheric-pressure plasma; processing methods; processing method; pressure plasma; plasma sources; plasma discharge; gas mixtures; plasma source; atmospheric pressure; gas mixture; plasma process; rf power; plasma processing; plasma torch; reactive species; mixtures containing; plasma jet; volume therebetween; thermal characteristics; parallel electrodes; active species; mhz rf; conventional plasma; unlike plasma; parallel electrode; plasma torches; active plasma; /313/315/

Citation Formats

Selwyn, Gary S., Henins, Ivars, Babayan, Steve E., and Hicks, Robert F. Large area atmospheric-pressure plasma jet. United States: N. p., 2001. Web.
Selwyn, Gary S., Henins, Ivars, Babayan, Steve E., & Hicks, Robert F. Large area atmospheric-pressure plasma jet. United States.
Selwyn, Gary S., Henins, Ivars, Babayan, Steve E., and Hicks, Robert F. Mon . "Large area atmospheric-pressure plasma jet". United States. https://www.osti.gov/servlets/purl/873868.
@article{osti_873868,
title = {Large area atmospheric-pressure plasma jet},
author = {Selwyn, Gary S. and Henins, Ivars and Babayan, Steve E. and Hicks, Robert F.},
abstractNote = {Large area atmospheric-pressure plasma jet. A plasma discharge that can be operated at atmospheric pressure and near room temperature using 13.56 MHz rf power is described. Unlike plasma torches, the discharge produces a gas-phase effluent no hotter than 250.degree. C. at an applied power of about 300 W, and shows distinct non-thermal characteristics. In the simplest design, two planar, parallel electrodes are employed to generate a plasma in the volume therebetween. A "jet" of long-lived metastable and reactive species that are capable of rapidly cleaning or etching metals and other materials is generated which extends up to 8 in. beyond the open end of the electrodes. Films and coatings may also be removed by these species. Arcing is prevented in the apparatus by using gas mixtures containing He, which limits ionization, by using high flow velocities, and by properly spacing the rf-powered electrode. Because of the atmospheric pressure operation, there is a negligible density of ions surviving for a sufficiently long distance beyond the active plasma discharge to bombard a workpiece, unlike the situation for low-pressure plasma sources and conventional plasma processing methods.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

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