Monolithic piezoelectric sensor (MPS) for sensing chemical, biochemical and physical measurands
- Bangor, ME
- Orono, ME
A piezoelectric sensor and assembly for measuring chemical, biochemical and physical measurands is disclosed. The piezoelectric sensor comprises a piezoelectric material, preferably a crystal, a common metal layer attached to the top surface of the piezoelectric crystal, and a pair of independent resonators placed in close proximity on the piezoelectric crystal such that an efficacious portion of acoustic energy couples between the resonators. The first independent resonator serves as an input port through which an input signal is converted into mechanical energy within the sensor and the second independent resonator serves an output port through which a filtered replica of the input signal is detected as an electrical signal. Both a time delay and an attenuation at a given frequency between the input signal and the filtered replica may be measured as a sensor output. The sensor may be integrated into an assembly with a series feedback oscillator and a radio frequency amplifier to process the desired sensor output. In the preferred embodiment of the invention, a selective film is disposed upon the grounded metal layer of the sensor and the resonators are encapsulated to isolate them from the measuring environment. In an alternative embodiment of the invention, more than two resonators are used in order to increase the resolution of the sensor.
- Research Organization:
- Biode, Inc., Bangor, ME
- DOE Contract Number:
- FG02-97ER82335
- Assignee:
- University of Maine (Orono, ME)
- Patent Number(s):
- US 6033852
- OSTI ID:
- 872895
- Country of Publication:
- United States
- Language:
- English
Similar Records
Electro-optic high voltage sensor
Circuit for echo and noise suppression of accoustic signals transmitted through a drill string
Related Subjects
acoustic
acoustic energy
alternative
alternative embodiment
amplifier
assembly
attached
attenuation
biochemical
chemical
close
close proximity
common
comprises
converted
couples
crystal
delay
desired
detected
disclosed
disposed
efficacious
electrical
electrical signal
embodiment
encapsulated
energy
environment
feedback
film
filtered
frequency
frequency amplifier
grounded
increase
independent
input
input signal
integrated
isolate
layer
layer attached
material
measurands
measured
measuring
mechanical
mechanical energy
metal
metal layer
monolithic
mps
oscillator
output
pair
physical
physical measurands
piezoelectric
piezoelectric crystal
piezoelectric material
piezoelectric sensor
placed
portion
preferably
preferred
preferred embodiment
process
proximity
radio
radio frequency
replica
resolution
resonator
resonators
selective
sensing
sensing chemical
sensor
sensor comprises
sensor output
series
serves
signal
surface
time
time delay
top
top surface