Coordinated X-Y stage apparatus

Patent · Sat Jan 01 00:00:00 EST 2000

OSTI ID:872822

Morimoto, Alan K ^[1]; Kozlowski, David M ^[1]; Charles, Steven T ^[2]; Spalding, James A ^[3]

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1. Albuquerque, NM
2. Germantown, TN
3. Springfield, KY

An apparatus based on precision X-Y stages that are stacked. Attached to arms projecting from each X-Y stage are a set of two axis gimbals. Attached to the gimbals is a rod, which provides motion along the axis of the rod and rotation around its axis. A dual-planar apparatus that provides six degrees of freedom of motion precise to within microns of motion.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6016607
• OSTI ID: 872822
• Country of Publication: United States
• Language: English

Related Subjects

coordinated
x-y
stage
apparatus
based
precision
stages
stacked
attached
arms
projecting
set
axis
gimbals
rod
provides
motion
rotation
dual-planar
six
degrees
freedom
precise
microns
six degrees
provides motion
provides six
x-y stages
apparatus based
arms projecting
axis gimbals
precision x-y
motion precise
x-y stage
dual-planar apparatus
six degree
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