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Time-of-flight SIMS/MSRI reflectron mass analyzer and method

Patent ·
OSTI ID:872787
 [1];  [2];  [3];  [4];  [5]
  1. Clifton Park, NY
  2. Downers Grove, IL
  3. Naperville, IL
  4. Houston, TX
  5. Colorado Springs, CO
+ Show Author Affiliations

A method and apparatus for analyzing the surface characteristics of a sample by Secondary Ion Mass Spectroscopy (SIMS) and Mass Spectroscopy of Recoiled Ions (MSRI) is provided. The method includes detecting back scattered primary ions, low energy ejected species, and high energy ejected species by ion beam surface analysis techniques comprising positioning a ToF SIMS/MSRI mass analyzer at a predetermined angle .theta., where .theta. is the angle between the horizontal axis of the mass analyzer and the undeflected primary ion beam line, and applying a specific voltage to the back ring of the analyzer. Preferably, .theta. is less than or equal to about 120.degree. and, more preferably, equal to 74.degree.. For positive ion analysis, the extractor, lens, and front ring of the reflectron are set at negative high voltages (-HV). The back ring of the reflectron is set at greater than about +700V for MSRI measurements and between the range of about +15 V and about +50V for SIMS measurements. The method further comprises inverting the polarity of the potentials applied to the extractor, lens, front ring, and back ring to obtain negative ion SIMS and/or MSRI data.

Research Organization:
Argonne National Laboratory (ANL), Argonne, IL
DOE Contract Number:
W-31109-ENG-38
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Number(s):
US 6008491
Application Number:
08/953,792
OSTI ID:
872787
Country of Publication:
United States
Language:
English

References (1)

Novel reflectron time of flight analyzer for surface analysis using secondary ion mass spectroscopy and mass spectroscopy of recoiled ions
  • Smentkowski, V. S.; Krauss, A. R.; Gruen, D. M.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 17, Issue 5 https://doi.org/10.1116/1.581923
journal September 1999

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Time-of-flight SIMS/MSRI reflectron mass analyzer and method
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Related Subjects

-hv
/250/
120
15
50v
700v
74
analysis
analysis technique
analysis techniques
analyzer
analyzing
angle
apparatus
applied
applying
axis
beam
beam line
characteristics
comprises
comprising
data
degree
detecting
ejected
energy
equal
extractor
front
horizontal
horizontal axis
inverting
lens
line
mass
mass analyzer
mass spectroscopy
measurements
method
msri
negative
obtain
polarity
positioning
positive
potentials
predetermined
predetermined angle
preferably
primary
provided
range
recoiled
reflectron
sample
scattered
secondary
set
sims
sims measurements
species
specific
spectroscopy
surface
surface analysis
surface characteristics
techniques
theta
time-of-flight
tof
undeflected
voltage
voltages