Deformable mirror for short wavelength applications

Patent · Fri Jan 01 00:00:00 EST 1999

OSTI ID:872678

Chapman, Henry N ^[1]; Sweeney, Donald W ^[2]

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1. 2417 Kilkare Rd., Sunol, CA 94586
2. 5020 Canyon Crest Dr., San Ramon, CA 94583

A deformable mirror compatible with short wavelength (extreme ultraviolet) radiation that can be precisely controlled to nanometer and subnanometer accuracy is described. Actuators are coupled between a reaction plate and a face plate which has a reflective coating. A control system adjusts the voltage supplied to the actuators; by coordinating the voltages supplied to the actuators, the reflective surface of the mirror can be deformed to correct for dimensional errors in the mirror or to produce a desired contour.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Chapman, Henry N. (2417 Kilkare Rd., Sunol, CA 94586);Sweeney, Donald W. (5020 Canyon Crest Dr., San Ramon, CA 94583)
• Patent Number(s): US 5986795
• OSTI ID: 872678
• Country of Publication: United States
• Language: English

Related Subjects

deformable
mirror
wavelength
applications
compatible
extreme
ultraviolet
radiation
precisely
controlled
nanometer
subnanometer
accuracy
described
actuators
coupled
reaction
plate
reflective
coating
control
adjusts
voltage
supplied
coordinating
voltages
surface
deformed
correct
dimensional
errors
produce
desired
contour
reflective coating
deformable mirror
extreme ultraviolet
reflective surface
voltage supplied
precisely controlled
precisely control
/359/