Deformable mirror for short wavelength applications
Patent
·
OSTI ID:872678
- 2417 Kilkare Rd., Sunol, CA 94586
- 5020 Canyon Crest Dr., San Ramon, CA 94583
A deformable mirror compatible with short wavelength (extreme ultraviolet) radiation that can be precisely controlled to nanometer and subnanometer accuracy is described. Actuators are coupled between a reaction plate and a face plate which has a reflective coating. A control system adjusts the voltage supplied to the actuators; by coordinating the voltages supplied to the actuators, the reflective surface of the mirror can be deformed to correct for dimensional errors in the mirror or to produce a desired contour.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Chapman, Henry N. (2417 Kilkare Rd., Sunol, CA 94586);Sweeney, Donald W. (5020 Canyon Crest Dr., San Ramon, CA 94583)
- Patent Number(s):
- US 5986795
- OSTI ID:
- 872678
- Country of Publication:
- United States
- Language:
- English
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