Liquid injection plasma deposition method and apparatus

Patent · Fri Jan 01 04:00:00 EST 1999

OSTI ID:872299

Kong, Peter C ^[1]; Watkins, Arthur D ^[1]

---

1. Idaho Falls, ID

A liquid injection plasma torch deposition apparatus for depositing material onto a surface of a substrate may comprise a plasma torch for producing a jet of plasma from an outlet nozzle. A plasma confinement tube having an inlet end and an outlet end and a central bore therethrough is aligned with the outlet nozzle of the plasma torch so that the plasma jet is directed into the inlet end of the plasma confinement tube and emerges from the outlet end of the plasma confinement tube. The plasma confinement tube also includes an injection port transverse to the central bore. A liquid injection device connected to the injection port of the plasma confinement tube injects a liquid reactant mixture containing the material to be deposited onto the surface of the substrate through the injection port and into the central bore of the plasma confinement tube.

• Research Organization: Idaho National Engineering and Environmental Laboratory, Idaho Falls, ID
• DOE Contract Number: AC07-94ID13223
• Assignee: Lockheed Martin Idaho Technologies Company (Idaho Falls, ID)
• Patent Number(s): US 5906757
• OSTI ID: 872299
• Country of Publication: United States
• Language: English

Related Subjects

/219/427/
aligned
apparatus
bore
bore therethrough
central
central bore
comprise
confinement
connected
containing
deposited
depositing
depositing material
deposition
deposition apparatus
deposition method
device
device connected
directed
emerges
injection
injection device
injection plasma
injects
inlet
jet
liquid
liquid injection
liquid reactant
material
method
mixture
mixture containing
nozzle
outlet
outlet nozzle
plasma
plasma confinement
plasma deposition
plasma jet
plasma torch
producing
reactant
reactant mixture
substrate
surface
therethrough
torch
transverse
tube