Near field optical probe for critical dimension measurements

Patent · Fri Jan 01 00:00:00 EST 1999

OSTI ID:872293

Stallard, Brian R ^[1]; Kaushik, Sumanth ^[2]

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1. Albuquerque, NM
2. Cambridge, MA

A resonant planar optical waveguide probe for measuring critical dimensions on an object in the range of 100 nm and below. The optical waveguide includes a central resonant cavity flanked by Bragg reflector layers with input and output means at either end. Light is supplied by a narrow bandwidth laser source. Light resonating in the cavity creates an evanescent electrical field. The object with the structures to be measured is translated past the resonant cavity. The refractive index contrasts presented by the structures perturb the field and cause variations in the intensity of the light in the cavity. The topography of the structures is determined from these variations.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 5905573
• OSTI ID: 872293
• Country of Publication: United States
• Language: English

Related Subjects

near
field
optical
probe
critical
dimension
measurements
resonant
planar
waveguide
measuring
dimensions
range
100
nm
below
central
cavity
flanked
bragg
reflector
layers
input
output
means
light
supplied
narrow
bandwidth
laser
source
resonating
creates
evanescent
electrical
structures
measured
translated
past
refractive
index
contrasts
perturb
variations
intensity
topography
determined
narrow bandwidth
output means
bragg reflector
electrical field
refractive index
optical probe
laser source
resonant cavity
optical waveguide
critical dimension
narrow band
near field
optical wave
bandwidth laser
planar optical
critical dimensions
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