Single coil bistable, bidirectional micromechanical actuator

Patent · Tue Sep 15 00:00:00 EDT 1998

OSTI ID:871846

Tabat, Ned ^[1]; Guckel, Henry ^[1]

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1. Madison, WI

Micromechanical actuators capable of bidirectional and bistable operation can be formed on substrates using lithographic processing techniques. Bistable operation of the microactuator is obtained using a single coil and a magnetic core with a gap. A plunger having two magnetic heads is supported for back and forth linear movement with respect to the gap in the magnetic core, and is spring biased to a neutral position in which the two heads are on each side of the gap in the core. The single electrical coil is coupled to the core and is provided with electrical current to attract one of the heads toward the core by reluctance action to drive the plunger to a limit of travel in one direction. The current is then cut off and the plunger returns by spring action toward the gap, whereafter the current is reapplied to the coil to attract the other head of the plunger by reluctance action to drive the plunger to its other limit of travel. This process can be repeated at a time when switching of the actuator is required.

• DOE Contract Number: AL5799
• Assignee: Wisconsin Alumni Research Foundation (Madison, WI)
• Patent Number(s): US 5808384
• Application Number: 08/869,789
• OSTI ID: 871846
• Country of Publication: United States
• Language: English

Related Subjects

single
coil
bistable
bidirectional
micromechanical
actuator
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capable
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formed
substrates
lithographic
processing
techniques
microactuator
obtained
magnetic
core
gap
plunger
heads
supported
forth
linear
movement
respect
spring
biased
neutral
position
electrical
coupled
provided
current
attract
reluctance
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drive
limit
travel
direction
cut
returns
whereafter
reapplied
head
process
repeated
time
switching
required
electrical current
magnetic core
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single electrical
micromechanical actuators
bistable operation
spring biased
stable operation
micromechanical actuator
processing technique
electrical coil
linear movement
lithographic processing
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