Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Electrically-programmable diffraction grating

Patent ·
OSTI ID:871582

An electrically-programmable diffraction grating. The programmable grating includes a substrate having a plurality of electrodes formed thereon and a moveable grating element above each of the electrodes. The grating elements are electrostatically programmable to form a diffraction grating for diffracting an incident beam of light as it is reflected from the upper surfaces of the grating elements. The programmable diffraction grating, formed by a micromachining process, has applications for optical information processing (e.g. optical correlators and computers), for multiplexing and demultiplexing a plurality of light beams of different wavelengths (e.g. for optical fiber communications), and for forming spectrometers (e.g. correlation and scanning spectrometers).

Research Organization:
SANDIA CORP
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
US 5757536
OSTI ID:
871582
Country of Publication:
United States
Language:
English

References (11)

A 128 X 128 frame-addressed deformable mirror spatial light modulator journal January 1991
Performance of nonplanar silicon diaphragms under large deflections journal June 1994
Miniature Fabry-Perot interferometers micromachined in silicon for use in optical fiber WDM systems conference January 1991
A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support journal November 1991
Deformable-Mirror Spatial Light Modulators conference May 1990
A bulk silicon dissolved wafer process for microelectromechanical devices journal June 1992
Deformable grating optical modulator journal January 1992
Micromechanical light modulator array fabricated on silicon journal October 1977
Design, fabrication, and testing of silicon microgimbals for super-compact rigid disk drives journal March 1995
Electrostatic Comb Drive Levitation And Control Method journal December 1992
Design of sealed cavity microstructures formed by silicon wafer bonding journal June 1993