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Using sputter coated glass to stabilize microstrip gas chambers

Patent ·
OSTI ID:871174
By sputter coating a thin-layer of low-resistive, electronically-conductive glass on various substrates (including quartz and ceramics, thin-film Pestov glass), microstrip gas chambers (MSGC) of high gain stability, low leakage current, and a high rate capability can be fabricated. This design can make the choice of substrate less important, save the cost of ion-implantation, and use less glass material.
Research Organization:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
Assignee:
Regents of University of California (Oakland, CA)
Patent Number(s):
US 5675470
OSTI ID:
871174
Country of Publication:
United States
Language:
English

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