Hydridosiloxanes as precursors to ceramic products
Patent
·
OSTI ID:870979
- San Jose, CA
- Piedmont, CA
- Palo Alto, CA
A method is provided for preparing ceramic precursors from hydridosiloxane starting materials and then pyrolyzing these precursors to give rise to silicious ceramic materials. Si--H bonds present in the hydridosiloxane starting materials are catalytically activated, and the activated hydrogen atoms may then be replaced with nonhydrogen substituents. These preceramic materials are pyrolyzed in a selected atmosphere to give the desired ceramic product. Ceramic products which may be prepared by this technique include silica, silicon oxynitride, silicon carbide, metal silicates, and mullite.
- Assignee:
- SRI International (Menlo Park, CA)
- Patent Number(s):
- US 5635250
- OSTI ID:
- 870979
- Country of Publication:
- United States
- Language:
- English
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