Acoustic wave (AW) based moisture sensor for use with corrosive gases
Patent
·
OSTI ID:870677
- Los Lunas, NM
- Cedar Crest, NM
- Albuquerque, NM
Moisture corrosive gas stream is measured as a function of the difference in resonant frequencies between two acoustic wave (AW) devices, each with a film which accepts at least one of the components of the gas stream. One AW is located in the gas stream while the other is located outside the gas stream but in the same thermal environment. In one embodiment, the film is a hydrophilic material such as SiO.sub.2. In another embodiment, the SiO.sub.2 is covered with another film which is impermeable to the corrosive gas, such that the AW device in the gas stream measures only the water vapor. In yet another embodiment, the film comprises polyethylene oxide which is hydrophobic and measures only the partial pressure of the corrosive gas. Other embodiments allow for compensation of drift in the system.
- Research Organization:
- AT & T CORP
- DOE Contract Number:
- AC04-76DP00789
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- US 5571944
- OSTI ID:
- 870677
- Country of Publication:
- United States
- Language:
- English
Acoustic wave microsensors. Part II
|
journal | November 1993 |
Acoustic Wave Microsensors
|
journal | November 1993 |
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covered
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hydrophilic
hydrophobic
impermeable
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