High resolution EUV monochromator/spectrometer
- Moraga, CA
This invention is related to a monochromator which employs a spherical mirror, a traveling plane mirror with simultaneous rotation, and a varied spacing plane grating. The divergent beam from the entrance slit is converged by the spherical mirror located at the various positions in the monochromator depending of the inventive system. To provide the meaningful diffraction efficiencies and to reduce unwanted higher order lights, the deviation angle subtending the incidence and diffraction beams for the plane grating is varied with the position of the traveling plane mirror with simultaneous rotation located in the front or back of the plane grating with wavelength scanning. The outgoing beam from the monochromator goes through the fixed exit slit and has same beam direction regardless of the scanning wavelength. The combination of properly designed motions of the plane mirror and novel varied-spacing parameters of the inventive plane grating corrects the aberrations and focuses the monochromatic spectral image on the exit slit, enabling measurements at high spectral resolution.
- Research Organization:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
- DOE Contract Number:
- AC03-76SF00098
- Assignee:
- Regents, University of California (Oakland, CA)
- Patent Number(s):
- US 5528364
- OSTI ID:
- 870481
- Country of Publication:
- United States
- Language:
- English
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aberrations
angle
beam
beam direction
beams
combination
converged
corrects
depending
designed
deviation
diffraction
direction
divergent
efficiencies
employs
enabling
entrance
entrance slit
euv
exit
fixed
focuses
front
grating
image
incidence
inventive
lights
located
meaningful
measurements
mirror
mirror located
monochromatic
monochromator
motions
novel
outgoing
outgoing beam
parameters
plane
plane grating
plane mirror
position
positions
properly
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reduce
regardless
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resolution
rotation
scanning
simultaneous
slit
spacing
spectral
spectral image
spectrometer
spherical
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subtending
traveling
unwanted
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varied-spacing
various
various positions
wavelength