System for monitoring the growth of crystalline films on stationary substrates

Patent · Sun Jan 01 04:00:00 EST 1995

OSTI ID:870102

Sheldon, Peter ^[1]

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1. Lakewood, CO

A system for monitoring the growth of crystalline films on stationary or rotating substrates includes a combination of some or all of the elements including a photodiode sensor for detecting the intensity of incoming light and converting it to a measurable current, a lens for focusing the RHEED pattern emanating from the phosphor screen onto the photodiode, an interference filter for filtering out light other than that which emanates from the phosphor screen, a current amplifier for amplifying and converting the current produced by the photodiode into a voltage, a computer for receiving the amplified photodiode current for RHEED data analysis, and a graphite impregnated triax cable for improving the signal to noise ratio obtained while sampling a stationary or rotating substrate. A rotating stage for supporting the substrate with diametrically positioned electron beam apertures and an optically encoded shaft can also be used to accommodate rotation of the substrate during measurement.

• Research Organization: MIDWEST RESEARCH INSTITUTE
• Sponsoring Organization: USDOE
• DOE Contract Number: AC02-83CH10093
• Assignee: Midwest Research Institute (Kansas City, MO)
• Patent Number(s): US 5456205
• OSTI ID: 870102
• Country of Publication: United States
• Language: English

Related Subjects

/117/
accommodate
amplified
amplifier
amplifying
analysis
apertures
beam
cable
combination
computer
converting
crystalline
crystalline films
current
current amplifier
current produced
data
data analysis
detecting
diametrically
electron
electron beam
elements
elements including
emanates
emanating
encoded
films
filter
filtering
focusing
graphite
growth
impregnated
improving
including
incoming
incoming light
intensity
interference
interference filter
lens
light
measurable
measurement
monitoring
noise
noise ratio
obtained
optically
pattern
phosphor
phosphor screen
photodiode
photodiode sensor
positioned
produced
ratio
receiving
rheed
rotating
rotating substrate
rotating substrates
rotation
sampling
screen
sensor
shaft
signal
stage
stationary
stationary substrates
substrate
substrates
supporting
triax
voltage