System for monitoring the growth of crystalline films on stationary substrates
- Lakewood, CO
A system for monitoring the growth of crystalline films on stationary or rotating substrates includes a combination of some or all of the elements including a photodiode sensor for detecting the intensity of incoming light and converting it to a measurable current, a lens for focusing the RHEED pattern emanating from the phosphor screen onto the photodiode, an interference filter for filtering out light other than that which emanates from the phosphor screen, a current amplifier for amplifying and converting the current produced by the photodiode into a voltage, a computer for receiving the amplified photodiode current for RHEED data analysis, and a graphite impregnated triax cable for improving the signal to noise ratio obtained while sampling a stationary or rotating substrate. A rotating stage for supporting the substrate with diametrically positioned electron beam apertures and an optically encoded shaft can also be used to accommodate rotation of the substrate during measurement.
- Research Organization:
- Midwest Research Institute, Kansas City, MO (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC02-83CH10093
- Assignee:
- Midwest Research Institute (Kansas City, MO)
- Patent Number(s):
- US 5456205
- OSTI ID:
- 870102
- Country of Publication:
- United States
- Language:
- English
Similar Records
System for monitoring the growth of crystalline films on stationary substrates
System for monitoring the growth of crystalline films on stationary substrates
Related Subjects
growth
crystalline
films
stationary
substrates
rotating
combination
elements
including
photodiode
sensor
detecting
intensity
incoming
light
converting
measurable
current
lens
focusing
rheed
pattern
emanating
phosphor
screen
interference
filter
filtering
emanates
amplifier
amplifying
produced
voltage
computer
receiving
amplified
data
analysis
graphite
impregnated
triax
cable
improving
signal
noise
ratio
obtained
sampling
substrate
stage
supporting
diametrically
positioned
electron
beam
apertures
optically
encoded
shaft
accommodate
rotation
measurement
rotating substrate
phosphor screen
current produced
data analysis
crystalline films
incoming light
interference filter
electron beam
elements including
noise ratio
current amplifier
rotating substrates
stationary substrates
photodiode sensor
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