Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Method for simultaneously coating a plurality of filaments

Patent ·
OSTI ID:869970
 [1];  [2];  [3];  [4]
  1. 1004 Matia Ct. NE., Albuquerque, NM 87123
  2. 3308 Morris St. NE., #11, Albuquerque, NM 87111
  3. 9900 Spain NE., Apt. W-2123, Albuquerque, NM 87111
  4. 11341 Academy Ridge Rd. NE., Albuquerque, NM 87111
Methods and apparatuses for coating materials, and the products and compositions produced thereby. Substances, such as diamond or diamond-like carbon, are deposited onto materials, such as a filament or a plurality of filaments simultaneously, using one or more cylindrical, inductively coupled, resonator plasma reactors.
Research Organization:
AT & T CORP
DOE Contract Number:
AC04-76DP00789
Assignee:
Miller, Paul A. (1004 Matia Ct. NE., Albuquerque, NM 87123);Pochan, Paul D. (3308 Morris St. NE., #11, Albuquerque, NM 87111);Siegal, Michael P. (9900 Spain NE., Apt. W-2123, Albuquerque, NM 87111);Dominguez, Frank (11341 Academy Ridge Rd. NE., Albuquerque, NM 87111)
Patent Number(s):
US 5431968
OSTI ID:
869970
Country of Publication:
United States
Language:
English

References (3)

Manufacturing technology report August 1993
Direct deposition of polycrystalline diamond films on Si(100) without surface pretreatment journal August 1991
Application of a low-pressure radio frequency discharge source to polysilicon gate etching journal January 1990