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Title: Method for simultaneously coating a plurality of filaments

Patent ·
OSTI ID:869970
 [1];  [2];  [3];  [4]
  1. 1004 Matia Ct. NE., Albuquerque, NM 87123
  2. 3308 Morris St. NE., #11, Albuquerque, NM 87111
  3. 9900 Spain NE., Apt. W-2123, Albuquerque, NM 87111
  4. 11341 Academy Ridge Rd. NE., Albuquerque, NM 87111

Methods and apparatuses for coating materials, and the products and compositions produced thereby. Substances, such as diamond or diamond-like carbon, are deposited onto materials, such as a filament or a plurality of filaments simultaneously, using one or more cylindrical, inductively coupled, resonator plasma reactors.

Research Organization:
AT&T
DOE Contract Number:
AC04-76DP00789
Assignee:
Miller, Paul A. (1004 Matia Ct. NE., Albuquerque, NM 87123);Pochan, Paul D. (3308 Morris St. NE., #11, Albuquerque, NM 87111);Siegal, Michael P. (9900 Spain NE., Apt. W-2123, Albuquerque, NM 87111);Dominguez, Frank (11341 Academy Ridge Rd. NE., Albuquerque, NM 87111)
Patent Number(s):
US 5431968
OSTI ID:
869970
Country of Publication:
United States
Language:
English

References (3)

Application of a low-pressure radio frequency discharge source to polysilicon gate etching journal January 1990
Direct deposition of polycrystalline diamond films on Si(100) without surface pretreatment journal August 1991
Manufacturing technology report August 1993