Interferometric fiber optic displacement sensor

Patent · Sun Jan 01 04:00:00 EST 1995

OSTI ID:869913

Farah, John

A method is presented to produce a change in the optical path length in the gap between two single mode optical fibers proportional to the lateral displacement of either fiber end normal to its axis. This is done with the use of refraction or diffraction at the interface between a guiding and non-guiding media to change the direction of propagation of the light in the gap. A method is also presented for laying a waveguide on a cantilever so that the displacement of the tip of the cantilever produces a proportional path length change in the gap by distancing the waveguide from the neutral axis of the cantilever. The fiber is supported as a cantilever or a waveguide is deposited on a micromachined cantilever and incorporated in an interferometer which is made totally on a silicon substrate with the use of integrated-optic technology. A resonant element in the form of a micro-bridge is incorporated in the ridge waveguide and produces a frequency output which is readily digitizeable and immune to laser frequency noise. Finally, monolithic mechanical means for phase modulation are provided on the same sensor substrate. This is done by vibrating the cantilever or micro-bridge either electrically or optically.

• Research Organization: Optisensors, Inc., Cambridge, MA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: FG02-90ER81033
• Assignee: Farah, John, Cambridge, MA (United States)
• Patent Number(s): 5,420,688
• Application Number: 07/990,622
• OSTI ID: 869913
• Country of Publication: United States
• Language: English

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