Ammonia release method for depositing metal oxides
Patent
·
OSTI ID:869646
- Centerville, OH
- Farmersville, OH
A method of depositing metal oxides on substrates which is indifferent to the electrochemical properties of the substrates and which comprises forming ammine complexes containing metal ions and thereafter effecting removal of ammonia from the ammine complexes so as to permit slow precipitation and deposition of metal oxide on the substrates.
- Research Organization:
- EG & G MOUND APPLIED TECH
- DOE Contract Number:
- AC04-88DP43495
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 5372847
- Application Number:
- 08/121,483
- OSTI ID:
- 869646
- Country of Publication:
- United States
- Language:
- English
Thin-film method
|
journal | March 1988 |
Turning Down the Heat on Thin Films
|
journal | July 1988 |
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Related Subjects
/427/
ammine
ammine complex
ammonia
chemical properties
complexes
comprises
comprises forming
containing
containing metal
depositing
depositing metal
deposition
effecting
electrochemical
electrochemical properties
forming
indifferent
metal
metal oxide
metal oxides
method
oxide
oxides
permit
precipitation
properties
release
removal
slow
substrates
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ammine
ammine complex
ammonia
chemical properties
complexes
comprises
comprises forming
containing
containing metal
depositing
depositing metal
deposition
effecting
electrochemical
electrochemical properties
forming
indifferent
metal
metal oxide
metal oxides
method
oxide
oxides
permit
precipitation
properties
release
removal
slow
substrates
thereafter