Radio-frequency powered glow discharge device and method with high voltage interface
- Knoxville, TN
- Clemson, SC
- Vienna, AT
- Oak Ridge, TN
A high voltage accelerating potential, which is supplied by a high voltage direct current power supply, is applied to the electrically conducting interior wall of an RF powered glow discharge cell. The RF power supply desirably is electrically grounded, and the conductor carrying the RF power to the sample held by the probe is desirably shielded completely excepting only the conductor's terminal point of contact with the sample. The high voltage DC accelerating potential is not supplied to the sample. A high voltage capacitance is electrically connected in series between the sample on the one hand and the RF power supply and an impedance matching network on the other hand. The high voltage capacitance isolates the high DC voltage from the RF electronics, while the RF potential is passed across the high voltage capacitance to the plasma. An inductor protects at least the RF power supply, and desirably the impedance matching network as well, from a short that might occur across the high voltage capacitance. The discharge cell and the probe which holds the sample are configured and disposed to prevent the probe's components, which are maintained at ground potential, from bridging between the relatively low vacuum region in communication with the glow discharge maintained within the cell on the one hand, and the relatively high vacuum region surrounding the probe and cell on the other hand. The probe and cell also are configured and disposed to prevent the probe's components from electrically shorting the cell's components.
- Research Organization:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- DOE Contract Number:
- AC05-84OR21400
- Assignee:
- Clemson University (Clemson, SC)
- Patent Number(s):
- US 5325021
- OSTI ID:
- 869375
- Country of Publication:
- United States
- Language:
- English
Radiofrequency cavity ion source in solids mass spectrometry
|
journal | August 1975 |
Glow‐discharge mass spectrometry—Technique for determining elemental composition profiles in solids
|
journal | April 1974 |
Analysis of geological samples by hollow cathode plume atomic emission spectrometry
|
journal | October 1987 |
Radio frequency powered glow discharge atomization/ionization source for solids mass spectrometry
|
journal | September 1989 |
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