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Title: CVD method for forming B.sub.i -containing oxide superconducting films

Abstract

Films of high T.sub.c Bi-Sr-Ca-Cu-O superconductor have been prepared by MOCVD using volatile metal organic precursors and water vapor. The metal organic precursors are volatized along with a bismuth source, such as Bi(C.sub.6 H.sub.5).sub.3, deposited on a heated substrate to form a film, and annealed.

Inventors:
 [1];  [2];  [2];  [3];  [4]
  1. (Wilmette, IL)
  2. (Evanston, IL)
  3. (Sanford, MI)
  4. (Chicago, IL)
Publication Date:
Research Org.:
Northwestern University
OSTI Identifier:
869203
Patent Number(s):
US 5296460
Assignee:
Northwestern University (Evanston, IL) CHO
DOE Contract Number:  
FG02-86ER13511
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
cvd; method; forming; -containing; oxide; superconducting; films; bi-sr-ca-cu-o; superconductor; prepared; mocvd; volatile; metal; organic; precursors; water; vapor; volatized; bismuth; source; deposited; heated; substrate; form; film; annealed; metal organic; -sr-ca-cu-o superconductor; superconducting film; oxide superconducting; water vapor; heated substrate; superconducting films; conducting films; organic precursors; organic precursor; conducting film; volatile metal; bi-sr-ca-cu-o superconductor; cvd method; /505/427/

Citation Formats

Wessels, Bruce W., Marks, Tobin J., Richeson, Darrin S., Tonge, Lauren M., and Zhang, Jiming. CVD method for forming B.sub.i -containing oxide superconducting films. United States: N. p., 1994. Web.
Wessels, Bruce W., Marks, Tobin J., Richeson, Darrin S., Tonge, Lauren M., & Zhang, Jiming. CVD method for forming B.sub.i -containing oxide superconducting films. United States.
Wessels, Bruce W., Marks, Tobin J., Richeson, Darrin S., Tonge, Lauren M., and Zhang, Jiming. Sat . "CVD method for forming B.sub.i -containing oxide superconducting films". United States. https://www.osti.gov/servlets/purl/869203.
@article{osti_869203,
title = {CVD method for forming B.sub.i -containing oxide superconducting films},
author = {Wessels, Bruce W. and Marks, Tobin J. and Richeson, Darrin S. and Tonge, Lauren M. and Zhang, Jiming},
abstractNote = {Films of high T.sub.c Bi-Sr-Ca-Cu-O superconductor have been prepared by MOCVD using volatile metal organic precursors and water vapor. The metal organic precursors are volatized along with a bismuth source, such as Bi(C.sub.6 H.sub.5).sub.3, deposited on a heated substrate to form a film, and annealed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}

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