Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

CVD method for forming B.sub.i -containing oxide superconducting films

Patent ·
OSTI ID:869203
; ; ; ;

Films of high T.sub.c Bi-Sr-Ca-Cu-O superconductor have been prepared by MOCVD using volatile metal organic precursors and water vapor. The metal organic precursors are volatized along with a bismuth source, such as Bi(C.sub.6 H.sub.5).sub.3, deposited on a heated substrate to form a film, and annealed.

Research Organization:
Northwestern University, Evanston, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-86ER13511
Assignee:
Northwestern University (Evanston, IL)
Patent Number(s):
5,296,460
Application Number:
07/926,156
OSTI ID:
869203
Country of Publication:
United States
Language:
English

References (7)

Growth of superconducting thin films of bismuth-strontium-calcium-copper oxide by organometallic chemical vapor deposition journal October 1988
Organometallic chemical vapor deposition of high T c superconducting Bi‐Sr‐Ca‐Cu‐O films journal March 1989
Formation of Bismuth Strontium Calcium Copper Oxide Superconducting Films by Chemical Vapor Deposition journal August 1988
Organometallic chemical vapor deposition of high T c superconducting films using a volatile, fluorocarbon‐based precursor journal October 1988
Superconducting Bi-Sr-Ca-Cu-O Thin Films Grown by Metalorganic Chemical Vapor Deposition at Different Temperatures journal September 1989
Chemical vapor deposition of YBa 2 Cu 3 O 7 using metalorganic chelate precursors journal October 1988
Preparation of Bi-Sr-Ca-Cu-O Superconducting Films by CVD journal May 1989

Similar Records

Formation of oriented high T sub c superconducting Bi-Sr-Ca-Cu-O thin films on silver substrates by organometallic chemical vapor deposition
Journal Article · 1990 · Applied Physics Letters; (USA) · OSTI ID:7007592
Method of forming superconducting Tl-Ba-Ca-Cu-O films
Patent · 1992 · OSTI ID:868656
Organometallic chemical vapor deposition of high T/sub c/ superconducting Bi-Sr-Ca-Cu-O films
Journal Article · 1989 · Appl. Phys. Lett.; (United States) · OSTI ID:6229761

Related Subjects

-containing
-sr-ca-cu-o superconductor
/505/427/
annealed
bi-sr-ca-cu-o
bi-sr-ca-cu-o superconductor
bismuth
conducting film
conducting films
cvd
cvd method
deposited
film
films
form
forming
heated
heated substrate
metal
metal organic
method
mocvd
organic
organic precursor
organic precursors
oxide
oxide superconducting
precursors
prepared
source
substrate
superconducting
superconducting film
superconducting films
superconductor
vapor
volatile
volatile metal
volatized
water
water vapor