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Extended range chemical sensing apparatus

Patent ·
OSTI ID:869129

An apparatus for sensing chemicals over extended range of concentrations. In particular, first and second sensors each having separate, but overlapping ranges for sensing concentrations of hydrogen are provided. Preferably, the first sensor is a MOS solid state device wherein the metal electrode or gate is a nickel alloy. The second sensor is a chemiresistor comprising a nickel alloy.

Research Organization:
AT & T CORP
DOE Contract Number:
AC04-76DP00789
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Number(s):
US 5279795
OSTI ID:
869129
Country of Publication:
United States
Language:
English

References (1)

Thin films of Pd/Ni alloys for detection of high hydrogen concentrations journal January 1992