Acoustic microscope surface inspection system and method

Patent · 31 December 1990

OSTI ID:867717

Khuri-Yakub, Butrus T ^[1]; Parent, Philippe ^[2]; Reinholdtsen, Paul A ^[3]

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1. Palo Alto, CA
2. Chilly-Mazarin, FR
3. Seattle, WA

An acoustic microscope surface inspection system and method in which pulses of high frequency electrical energy are applied to a transducer which forms and focuses acoustic energy onto a selected location on the surface of an object and receives energy from the location and generates electrical pulses. The phase of the high frequency electrical signal pulses are stepped with respected to the phase of a reference signal at said location. An output signal is generated which is indicative of the surface of said selected location. The object is scanned to provide output signals representative of the surface at a plurality of surface locations.

• Research Organization: Stanford University
• DOE Contract Number: FG03-84ER45157
• Assignee: Board of Trustees of Leland Stanford Junior University (Stanford, CA)
• Patent Number(s): US 4995259
• OSTI ID: 867717
• Country of Publication: United States
• Language: English

Related Subjects

/73/
acoustic
acoustic energy
acoustic microscope
applied
electrical
electrical energy
electrical pulse
electrical pulses
electrical signal
energy
focuses
forms
frequency
frequency electric
frequency electrical
generated
generates
generates electrical
indicative
inspection
location
locations
method
microscope
microscope surface
output
output signal
output signals
phase
plurality
provide
provide output
pulses
receives
reference
reference signal
representative
respected
scanned
selected
selected location
signal
signal pulse
signal pulses
signals
signals representative
stepped
surface
surface inspection
surface location
transducer