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Title: Acoustic microscope surface inspection system and method

Abstract

An acoustic microscope surface inspection system and method in which pulses of high frequency electrical energy are applied to a transducer which forms and focuses acoustic energy onto a selected location on the surface of an object and receives energy from the location and generates electrical pulses. The phase of the high frequency electrical signal pulses are stepped with respected to the phase of a reference signal at said location. An output signal is generated which is indicative of the surface of said selected location. The object is scanned to provide output signals representative of the surface at a plurality of surface locations.

Inventors:
 [1];  [2];  [3]
  1. Palo Alto, CA
  2. Chilly-Mazarin, FR
  3. Seattle, WA
Publication Date:
Research Org.:
Stanford Univ., CA (United States)
OSTI Identifier:
867717
Patent Number(s):
US 4995259
Assignee:
Board of Trustees of Leland Stanford Junior University (Stanford, CA)
DOE Contract Number:  
FG03-84ER45157
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
acoustic; microscope; surface; inspection; method; pulses; frequency; electrical; energy; applied; transducer; forms; focuses; selected; location; receives; generates; phase; signal; stepped; respected; reference; output; generated; indicative; scanned; provide; signals; representative; plurality; locations; signals representative; acoustic microscope; provide output; output signals; reference signal; electrical energy; electrical signal; output signal; acoustic energy; electrical pulses; selected location; surface location; signal pulses; signal pulse; electrical pulse; microscope surface; generates electrical; frequency electrical; surface inspection; frequency electric; /73/

Citation Formats

Khuri-Yakub, Butrus T, Parent, Philippe, and Reinholdtsen, Paul A. Acoustic microscope surface inspection system and method. United States: N. p., 1991. Web.
Khuri-Yakub, Butrus T, Parent, Philippe, & Reinholdtsen, Paul A. Acoustic microscope surface inspection system and method. United States.
Khuri-Yakub, Butrus T, Parent, Philippe, and Reinholdtsen, Paul A. Tue . "Acoustic microscope surface inspection system and method". United States. https://www.osti.gov/servlets/purl/867717.
@article{osti_867717,
title = {Acoustic microscope surface inspection system and method},
author = {Khuri-Yakub, Butrus T and Parent, Philippe and Reinholdtsen, Paul A},
abstractNote = {An acoustic microscope surface inspection system and method in which pulses of high frequency electrical energy are applied to a transducer which forms and focuses acoustic energy onto a selected location on the surface of an object and receives energy from the location and generates electrical pulses. The phase of the high frequency electrical signal pulses are stepped with respected to the phase of a reference signal at said location. An output signal is generated which is indicative of the surface of said selected location. The object is scanned to provide output signals representative of the surface at a plurality of surface locations.},
doi = {},
url = {https://www.osti.gov/biblio/867717}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1991},
month = {1}
}

Patent:

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