Acoustic microscope surface inspection system and method

Patent · Tue Jan 01 00:00:00 EST 1991

OSTI ID:867717

Khuri-Yakub, Butrus T ^[1]; Parent, Philippe ^[2]; Reinholdtsen, Paul A ^[3]

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1. Palo Alto, CA
2. Chilly-Mazarin, FR
3. Seattle, WA

An acoustic microscope surface inspection system and method in which pulses of high frequency electrical energy are applied to a transducer which forms and focuses acoustic energy onto a selected location on the surface of an object and receives energy from the location and generates electrical pulses. The phase of the high frequency electrical signal pulses are stepped with respected to the phase of a reference signal at said location. An output signal is generated which is indicative of the surface of said selected location. The object is scanned to provide output signals representative of the surface at a plurality of surface locations.

• Research Organization: Stanford Univ., CA (United States)
• DOE Contract Number: FG03-84ER45157
• Assignee: Board of Trustees of Leland Stanford Junior University (Stanford, CA)
• Patent Number(s): US 4995259
• OSTI ID: 867717
• Country of Publication: United States
• Language: English

Related Subjects

acoustic
microscope
surface
inspection
method
pulses
frequency
electrical
energy
applied
transducer
forms
focuses
selected
location
receives
generates
phase
signal
stepped
respected
reference
output
generated
indicative
scanned
provide
signals
representative
plurality
locations
signals representative
acoustic microscope
provide output
output signals
reference signal
electrical energy
electrical signal
output signal
acoustic energy
electrical pulses
selected location
surface location
signal pulses
signal pulse
electrical pulse
microscope surface
generates electrical
frequency electrical
surface inspection
frequency electric
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