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Boron hydride polymer coated substrates

Patent ·
OSTI ID:866395
 [1];  [2];  [2]
  1. Pleasanton, CA
  2. Livermore, CA
+ Show Author Affiliations
A method is disclosed for coating a substrate with a uniformly smooth layer of a boron hydride polymer. The method comprises providing a reaction chamber which contains the substrate and the boron hydride plasma. A boron hydride feed stock is introduced into the chamber simultaneously with the generation of a plasma discharge within the chamber. A boron hydride plasma of ions, electrons and free radicals which is generated by the plasma discharge interacts to form a uniformly smooth boron hydride polymer which is deposited on the substrate.
Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
DOE Contract Number:
W-7405-ENG-48
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Number(s):
US 4701379
OSTI ID:
866395
Country of Publication:
United States
Language:
English

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Related Subjects

/428/376/427/
boron
boron hydride
chamber
coated
coated substrate
coated substrates
coating
comprises
comprises providing
contains
deposited
discharge
disclosed
electrons
feed
feed stock
form
free
free radical
free radicals
generated
generation
hydride
hydride polymer
interacts
introduced
layer
method
method comprise
method comprises
plasma
plasma discharge
polymer
providing
radicals
reaction
reaction chamber
simultaneously
smooth
stock
substrate
substrates
uniformly