High power linear pulsed beam annealer

Patent · Sat Jan 01 04:00:00 EST 1983

OSTI ID:864481

Strathman, Michael D ^[1]; Sadana, Devendra K ^[2]; True, Richard B ^[3]

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1. Concord, CA
2. Berkeley, CA
3. Sunnyvale, CA

A high power pulsed electron beam is produced in a system comprised of an electron gun having a heated cathode, control grid, focus ring, and a curved drift tube. The drift tube is maintained at a high positive voltage with respect to the cathode to accelerate electrons passing through the focus ring and to thereby eliminate space charge. A coil surrounding the curved drift tube provides a magnetic field which maintains the electron beam focused about the axis of the tube and imparts motion on electrons in a spiral path for shallow penetration of the electrons into a target. The curvature of the tube is selected so there is no line of sight between the cathode and a target holder positioned within a second drift tube spaced coaxially from the curved tube. The second tube and the target holder are maintained at a reference voltage that decelerates the electrons. A second coil surrounding the second drift tube maintains the electron beam focused about the axis of the second drift tube and compresses the electron beam to the area of the target. The target holder can be adjusted to position the target where the cross section of the beam matches the area of the target.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA
• DOE Contract Number: W-7405-ENG-48
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4371774
• OSTI ID: 864481
• Country of Publication: United States
• Language: English

Related Subjects

/219/250/313/315/
accelerate
accelerate electrons
adjusted
annealer
axis
beam
beam focus
cathode
charge
coaxially
coil
compresses
comprised
control
curvature
curved
decelerates
drift
drift tube
electron
electron beam
electron gun
electrons
electrons pass
electrons passing
eliminate
field
focus
focused
grid
gun
heated
holder
imparts
line
linear
linear pulse
magnetic
magnetic field
maintained
maintains
matches
motion
passing
path
penetration
position
positioned
positive
positive voltage
power
power line
power pulse
power pulsed
produced
provides
pulsed
pulsed beam
pulsed electron
reference
reference voltage
respect
section
selected
shallow
sight
space
space charge
spaced
spiral
surrounding
target
tube
voltage