Microinterferometer transducer

Patent · Mon Jan 01 04:00:00 EST 1979

OSTI ID:863348

An air-bearing microinterferometer transducer is provided for increased accuracy, range and linearity over conventional displacement transducers. A microinterferometer system is housed within a small compartment of an air-bearing displacement transducer housing. A movable cube corner reflector of the interferometer is mounted to move with the displacement gauging probe of the transducer. The probe is disposed for axial displacement by means of an air-bearing. Light from a single frequency laser is directed into an interferometer system within the transducer housing by means of a self-focusing fiber optic cable to maintain light coherency. Separate fringe patterns are monitored by a pair of fiber optic cables which transmit the patterns to a detecting system. The detecting system includes a bidirectional counter which counts the light pattern fringes according to the direction of movement of the probe during a displacement gauging operation.

• Research Organization: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN
• DOE Contract Number: W-7405-ENG-26
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4153370
• OSTI ID: 863348
• Country of Publication: United States
• Language: English

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