Composition analysis of ECR-grown SiO{sub 2} and SiO{sub x}F{sub y} films
Conference
·
OSTI ID:86284
- Idaho State Univ., Pocatello, ID (United States)
- Lam Research Corp., Fremont, CA (United States)
- Sandia National Labs., Albuquerque, NM (United States)
The Office of integrated Analysis and Forecasting (OIAF) is required to provide complete model documentation to meet the EIA Model Acceptance Standards. The Model Documentation for the Electricity Market Module (EMM) provides a complete description of the EMM methodology, structure, and relation to other modules in the National Energy Modeling System (NEMS). This Model Developers Report (MDR) serves as an appendix to the methodology documentation. The MDR provides an assessment of the sensitivity of the EMM results to changes in input data or parameters.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 86284
- Report Number(s):
- SAND--95-1425C; CONF-9505122--1; ON: DE95014860
- Country of Publication:
- United States
- Language:
- English
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