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Nanoscale fluctuations in the distribution of dopant

Journal Article · Mon Jan 19 04:00:00 EST 2004 · Journal of Vacuum Science and Technology B

DOI:https://doi.org/10.1116/1.1771680· OSTI ID:842777

Ebert, Ph ^[1]; Jager, N D; Urban, K; Weber, E R

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Research Organization:: Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)

Sponsoring Organization:: DOE

DOE Contract Number:: AC03-76SF00098

OSTI ID:: 842777

Report Number(s):: LBNL--57132

Journal Information:: Journal of Vacuum Science and Technology B, Journal Name: Journal of Vacuum Science and Technology B Journal Issue: 4 Vol. 22

Country of Publication:: United States

Language:: English

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Related Subjects

36 MATERIALS SCIENCE
DOPED MATERIALS
FLUCTUATIONS
NANOSTRUCTURES
SPATIAL DISTRIBUTION