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Measurement of lateral charge diffusion in thick, fully depleted, back-illuminated CCDs

Journal Article · · IEEE Transaction on Nuclear Science

Lateral charge diffusion in back-illuminated CCDs directly affects the point spread function (PSF) and spatial resolution of an imaging device. This can be of particular concern in thick, back-illuminated CCDs. We describe a technique of measuring this diffusion and present PSF measurements for an 800 x 1100, 15 mu m pixel, 280 mu m thick, back-illuminated, p-channel CCD that can be over-depleted. The PSF is measured over a wavelength range of 450 nm to 650 nm and at substrate bias voltages between 6 V and 80 V.

Research Organization:
Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
Sponsoring Organization:
USDOE Director. Office of Science. Office of High Energy and Nuclear Physics. Division of High Energy Physics (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
836977
Report Number(s):
LBNL--55685
Journal Information:
IEEE Transaction on Nuclear Science, Journal Name: IEEE Transaction on Nuclear Science Journal Issue: 5 Vol. 51
Country of Publication:
United States
Language:
English

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