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Deposition of Zinc Oxide Thin Films by Combustion CVD

Journal Article · Wed Dec 15 04:00:00 EST 1999 · Thin Solid Films

DOI:https://doi.org/10.1016/S0040-6090(99)00646-X· OSTI ID:829433

Polley, T A ^[1]

ORNL

No abstract prepared.

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Research Organization:: ORNL Oak Ridge National Laboratory

Sponsoring Organization:: DOE

DOE Contract Number:: AC05-00OR22725

OSTI ID:: 829433

Report Number(s):: P00-107124

Journal Information:: Thin Solid Films, Journal Name: Thin Solid Films Journal Issue: 2 Vol. 357; ISSN THSFAP; ISSN 0040-6090

Country of Publication:: United States

Language:: English

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Related Subjects

36 MATERIALS SCIENCE
CHEMICAL VAPOR DEPOSITION
COMBUSTION
THIN FILMS
ZINC OXIDES