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Title: High resolution synchrotron radiation-based X-ray photoemission spectroscopy study of the Si-rich beta-SiC(100) 3x2 surface oxidation

Journal Article · · Journal of Vacuum Science and Technology B
DOI:https://doi.org/10.1116/1.1589515· OSTI ID:828140

No abstract prepared.

Research Organization:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE Director. Office of Science. Office of Basic Energy Sciences (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
828140
Report Number(s):
LBNL-55615; R&D Project: A580SS; TRN: US0403847
Journal Information:
Journal of Vacuum Science and Technology B, Vol. 21, Issue 4; Other Information: Journal Publication Date: 08/05/2003; PBD: 24 Jan 2003
Country of Publication:
United States
Language:
English