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U.S. Department of Energy
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Sputtering with polyatomic ions : revisiting kinetic energy distributions of secondary ions.

Conference ·
OSTI ID:827214

No abstract prepared.

Research Organization:
Argonne National Lab., IL (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
W-31109-ENG-38
OSTI ID:
827214
Report Number(s):
ANL/MSD/CP-110990
Country of Publication:
United States
Language:
English