Sputtering with polyatomic ions : revisiting kinetic energy distributions of secondary ions.
Conference
·
OSTI ID:827214
No abstract prepared.
- Research Organization:
- Argonne National Lab., IL (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 827214
- Report Number(s):
- ANL/MSD/CP-110990
- Country of Publication:
- United States
- Language:
- English
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