The decomposition of methyltrichlorosilane in hydrogen and helium

Conference · Tue Aug 01 00:00:00 EDT 1995

OSTI ID:82546

Osterheld, T H; Allendorf, M D ^[1]

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1. Sandia National Labs., Livermore, CA (United States)

Experimental measurements of the decomposition of methyltrichlorosilane (MTS), a common silicon carbide precursor, in a high-temperature flow reactor are presented. Methane, hydrogen chloride, and silicon tetrachloride are observed as products of the decomposition. Trapping experiments with acetylene and ethylene also detected SiCl{sub 3} as a decomposition product. Upper limits on the concentrations of any CH{sub 3}Cl, HSiCl{sub 3}, H{sub 2}SiCl{sub 2}, or H{sub 2}C = SiCl{sub 2} which might form are provided. Quantitative measurements of product branching and MTS decomposition rates are presented. The results suggest a radical-chain mechanism for the decomposition in hydrogen but not in helium.

• OSTI ID: 82546
• Report Number(s): CONF-941144--; ISBN 1-55899-264-2
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
40 CHEMISTRY
ARRHENIUS EQUATION
CHEMICAL REACTION KINETICS
CHEMICAL VAPOR DEPOSITION
CHLORINE COMPOUNDS
DECOMPOSITION
FLOW RATE
HELIUM
HYDROCHLORIC ACID
HYDROGEN
MASS SPECTROSCOPY
METHANE
SILANES
SILICON CARBIDES
SILICON CHLORIDES
TEMPERATURE DEPENDENCE