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Defocus step size of the LBNL One Angstrom Microscope

Technical Report ·
DOI:https://doi.org/10.2172/817235· OSTI ID:817235
The change in focus of a high-resolution electron microscope is generally assumed to be linear with change in objective lens current. Thus the defocus step size should be constant for a constant step in lens current. Measurements on the LBNL One-Angstrom Microscope show that the step size increases with increasing underfocus (reduced lens current). Differentiation of the best-fit quadratic shows that the defocus step size varies linearly as defocus changes.
Research Organization:
Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
Sponsoring Organization:
USDOE Director, Office of Science. Office of Basic Energy Sciences. Materials Science and Engineering Division (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
817235
Report Number(s):
LBNL/PUB--3170
Country of Publication:
United States
Language:
English

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