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Fabrication of MEMS components based on ultrananocrystalline diamond thin films and characterization of mechanical properties.

Conference ·
OSTI ID:813776
; ; ; ; ; ; ; ; ; ; ;
No abstract prepared.
Research Organization:
Argonne National Lab., IL (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
W-31109-ENG-38
OSTI ID:
813776
Report Number(s):
ANL/MSD/CP-104005
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
DIAMONDS
FABRICATION
INTEGRATED CIRCUITS
MECHANICAL PROPERTIES
MINIATURIZATION
THIN FILMS