Spectroscopic determination of C{sub 2} in Ar/H{sub 2}/CH{sub 4} and Ar/H{sub 2}/C{sub 60} microwave plasmas for nanocrystalline diamond synthesis.

Conference · Wed Feb 04 23:00:00 EST 1998

OSTI ID:8108

Goyette, A N; Lawler, J E; Anderson, L W; Gruen, D M; McCauley, T G; Zhou, D; Krauss, A R

We have measured the steady state concentration of gas phase C{sub 2} in Ar/H{sub 2}/CH{sub 4} and Ar/H{sub 2}/C{sub 60} microwave plasmas used for the deposition of nanocrystalline diamond films. High sensitivity white light absorption spectroscopy is used to monitor the C{sub 2} density using the d{sup 3}II {l_arrow} A{sup 3}II (0,0) vibrational band of C{sub 2} as chamber pressure, microwave power, substrate temperature and feed gas mixtures are varied in both chemistries. Understanding how these parameters influence the C{sub 2} density in the plasma volume provides insight into discharge mechanisms relevant to the deposition of nanocrystalline diamond.

• Research Organization: Argonne National Lab., IL (US)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 8108
• Report Number(s): ANL/CHM/CP-93845
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ABSORPTION SPECTROSCOPY
ARGON
CARBON
CONCENTRATION RATIO
DEPOSITION
DIAMONDS
FULLERENES
HYDROGEN
METHANE
MIXTURES
SYNTHESIS
VIBRATIONAL STATES